[mems-talk] Problem with PDMS removal from the SU-8 mold

Gareth gjenkins at f2s.com
Fri Feb 23 17:16:36 EST 2007


Try exposing even longer. (Don't worry about what the datasheet says - 50um structures will be fine).
An image will become visible before PEB with a high enough dose which should be good enough to align to.
If not, perhaps try a lower temperature PEB to reduce the stress.



More information about the MEMS-talk mailing list