[mems-talk] pmma lithography

[Jim Beall]

google "UV expose PMMA" and you will find lots of info including the  
Microchem datasheet on PMMA which includes the statement:
"DUV(deep UV): Low sensitivity, requiring doses >500mJ/cm2 at 248nm. "


On Feb 25, 2007, at 3:44 PM, davidfozdar at mail.utexas.edu wrote:

> PMMA is used mostly for electron beam lithography (EBL).  I don't  
> think it
> responds to UV light; although, I've never exposed PMMA.