[mems-talk] pmma lithography

[Chris Park]

I am pretty sure one can expose PMMA with DUV light source.
People often use positive photoresist as a mask to DUV to pattern
transfer down to PMMA to make a lift-off structure.
Chris

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of Chen Han Lee
Sent: Saturday, February 24, 2007 8:40 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] pmma lithography

hi all,
 
i am wondering if pmma can be patterned by UV radiation?
I know that the most common exposure source is X-ray, but is there
others?