[mems-talk] lihography problem

[P.E.M. Kuijpers]

Hello,

Spraycoating would solve this problem or when you have a conductive layer 
an Electro Disposable resist (Eagle) is also an option.


Peter Kuijpers
MiPlaza
DTS/TFF
High Tech Campus 04
Room: WAGp5-11
5656 AE Eindhoven
The Netherlands

Phone.:  (+31 40 27) 98904 (mobex)
mobile:(+31) 06-12507027
fax.:     [+31 40 27) 44769
mailto:p.e.m.kuijpers at philips.com


"abhaya joshi" <joshaby at gmail.com> 
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Subject
[mems-talk] lihography problem
Classification

hi friends
i have etched si wafer for 30 um using KOH. the cavities are of size 1000 
X
2000 um.
but when i am doing lithography on this surface, the photoresist is not
covering all the  area, specially from top side of top surface.
i have tried with thicker photoresist (at 2000 RPM), but it is not 
working.
i am using HNR120 (-ve PR) and S1813 (+ve PR)
please suggest me to solve this problem.
-abhay joshi