[mems-talk] Wet etch chemistry for evaporated titanium

[Brent Garber]

Yue,

Just use H2O2.  Warm to 50c.

Brent

Yue Mun Pun, Jeffrey wrote:
> Hi,
> I need to etch Titanium in my device using a safe wet etch chemistry.  I understand that HF is normally used to etch titanium films but this chemical is too dangerous.  Can anyone suggest a safer wet etch chemistry?  Can I use NH4OH:H2O2 chemistry to etch titanium?