[mems-talk] I have a problem with su8 2100

[Gareth Jenkins]

You can use Omnicoat to improve adhesion on glass. Adequate adhesion is 
possible without it but needs more careful wafer preparation and process.
Dehydration of the glass is very important and you have to carefully 
optimise the baking steps. Can you be more specific as to where and how 
in your process is it not working?


saravan kallempudi wrote:
> Hi'
> I was unable top get uniformed coating on the micro glass slides by using su8 2100.
> Can anyone help me to get a uniformed layer on the microglass slides. I worked on wafers but it isnt working on glass slides.
>