[mems-talk] Photolithography, baking temperature

jpt sharma jptsharma at yahoo.com
Wed Jan 3 10:04:54 EST 2007


HI All
Is there any photoresist which needed about 75C baking temperature ? 
I want to to photolithography with image reversal but can't bake the resist above 75C.
Look forward to hearing from you guys.

JPT


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