[mems-talk] purge with N2
Qiao Dayong
dyqiao at nwpu.edu.cn
Wed Jan 3 20:01:17 EST 2007
It's used to test the level of liquid
>From: "abdelyamine" <nlamine6 at hotmail.com>
>Reply-To: General MEMS discussion <mems-talk at memsnet.org>
>To: "'General MEMS discussion'" <mems-talk at memsnet.org>
>Subject: [mems-talk] purge with N2
>Date:Wed, 3 Jan 2007 13:40:03 +0100
>
>Hello
>
> I've found on flow diagram of my equipment (Spray Acid Tool), that the tanks
> of chemicals (H2SO4, HF.) are purged with N2. Could anyone tell me why,
> please!!
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