[mems-talk] SIMOX (Separation by Implantation Of Oxygen) of Germanium

Long Chen lc286 at cornell.edu
Fri Jan 5 12:23:36 EST 2007


Hi, has anyone worked with or heard of SIMOX (Separation by Implantation 
Of Oxygen) of Germanium wafer, similar to the one done regularly in 
Silicon industries? Please let me know if you have any information 
related. Thanks a lot,
Long




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