[mems-talk] ordered porous structure

[Lung-hao Hu]

You wanna use the porous materials to be the dielectric layer ??
There are lots of papers talking about porous silicon. You can google it.
Also carbon nanotube is already commercialized. You purchase the bulky CNT and
then sonicate and filter out commercial CNT+surfactant to become a paper.
Or directly purchase carbon cloth to be this porous material.

Best regards,

Lung-hao Hu

Graduate Student

Dept.of Mechanical Engineering
Univ.of Colorado Boulder
UCB 427 CO 80309 U.S.A
Email:lung.hu at colorado.edu