[mems-talk] PMMA

[paolo bondavalli]

Dear members,
I need some information abour PMMA.
Is it used for photo-lithography?
Is it photo-sensitive?
Is it resistant to ethanol?

Thank you very much;

Paolo Bondavalli
Nanostructures Electroniques, Nanocarb
THALES RESEARCH AND TECHNOLOGY
Route Departementale 128
F91767 Palaiseau Cedex
(FRANCE)
Tel : 01 69 41 58 83
Fax : 01 69 41 57 38
Email : Paolo.Bondavalli at thalesgroup.com