[mems-talk] How to clean PDMS or PLGA thin film on the Si chip

欢黄 edwardadaiming at gmail.com
Wed Jan 10 15:42:01 EST 2007


Hi, I have tried several ways to clean the PDMS thin film on the Silicon
pattern(including HF, Piranha,etc). But the result is not good and
especially I want to clean the PDMS in the hole of Si chip. Does anybody
know how to clean it or any paper mentioned the way of cleaning? Thank you
very much!!

Eddie.


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