[mems-talk] PMMA

[Ranjini Menon]

Dear Paolo,
PMMA can be used for photo/ionbeam/ electron beam lithography

On 1/10/07, paolo bondavalli <paolo.bondavalli at thalesgroup.com> wrote:
>
> Dear members,
> I need some information abour PMMA.
> Is it used for photo-lithography?
> Is it photo-sensitive?
> Is it resistant to ethanol?
>
-- 
Ranjini Menon
Scientific Officer
VECC
Department of Atomic Energy
1/AF , Salt lake city
Kolkata
West bengal-700064
phone:033 2337 1230 extn 3204
fax: 033 2334 6871
e-mail: ranjini at veccal.ernet.in