[mems-talk] Force and Acceleration Sensors

[Rana, Mukti M]

Hi

I am working on integrated force and acceleration sensors. Both of the
sensors would preferably be made of piezoresistive poly-silicon
material. I am new in this field and would like to get more information
on those. Can someone help me by mentioning the name of some books,
articles or journal papers? I am looking for both the design and
fabrication parts. Any help will be appreciated.

Thank you,

Mukti M Rana
PhD. Student in Electrical Engineering
The University of Texas at Arlington