[mems-talk] Adhesion BPR100 resist on AuZn

P.E.M. Kuijpers p.e.m.kuijpers at philips.com
Fri Jan 12 02:48:11 EST 2007


Hello,

Does anyone know how to improve the adhesion of BPR100 resist (20µm) on an
200nm AuZn layer. At this moment patterns are flushed away during
spraydevelopment.

Thanks in advance.
Peter Kuijpers
Philips Applied Technologies
mailto:p.e.m.kuijpers at philips.com



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