[mems-talk] Adhesion BPR100 resist on AuZn

[Bill Moffat]

Vacuum vapor prime creates perfect adhesion between organic and inorganic material. The vacuum/hot nitrogen purges dehydrate the surface completely and the vapor of HMDS never sees moisture.  Result in thousands of installations a perfect adhesion layer that never changes.  We have total success shipping treated wafers overseas.  Send us some wafers we will treat for free.

Bill Moffat, CEO
Yield Engineering Systems, Inc. 
2185 Oakland Rd., San Jose, CA  95131
(408) 954-8353
cell 408 590 4577
bmoffat at yieldengineering.com
www.yieldengineering.com

-----Original Message-----
From: mems-talk-bounces at memsnet.org [mailto:mems-talk-bounces at memsnet.org] On Behalf Of P.E.M. Kuijpers
Sent: Thursday, January 11, 2007 11:48 PM
To: mems-talk at memsnet.org
Subject: [mems-talk] Adhesion BPR100 resist on AuZn

Hello,

Does anyone know how to improve the adhesion of BPR100 resist (20µm) on an 200nm AuZn layer. At this moment patterns are flushed away during spraydevelopment.