[mems-talk] Cyclohexane sublimation

[Ernesto Di Paola]

Hi all,
I'm tring to release cantilever structures by means of the sublimation of
the cyclohexane at low pressure (10e-1 mbar). My problem is that after the
sublimation some drops (like gel) remain on the substrate. Maybe my
sublimation process is not effective...
Could anybody provide me the phase diagram of the cyclohexane?

Best regards,
Ernesto Di Paola