hi, could anybody share with me her/his nitride etching recepie please?!!! wish to etch away ~200nm of nitride (SiNx) from a polymer substrate! cheers dadhichi -- Dadhichi Paretkar Department of Materials Science & Metallurgy Nanoscience Centre University of Cambridge 11. J J Thomson Avenue Cambridge CB3 0FF +44 1223 760314/13 email: drp32 at cam.ac.uk