[mems-talk] nitride etch

[bobhendu at aol.com]

Dadhichi:
 
What type of plasma etch system do you have? Bob Henderson 
 
 
-----Original Message-----
From: drp32 at cam.ac.uk
To: mems-talk at memsnet.org
Sent: Mon, 15 Jan 2007 7:52 AM
Subject: [mems-talk] nitride etch


hi, 
could anybody share with me her/his nitride etching recepie please?!!! wish to etch away ~200nm of nitride (SiNx) from a polymer substrate! cheers