[mems-talk] Lift-off Recipe

[Ravi Shankar]

Hi all,

   I need to use lift-off process for my device fabrication.. So far
we haven't standardised lift-off process in our lab. We are suing
S1813 and HNR 120 photoresists... Is it possible to achieve lift-off
process with these low thickness photoresists? Can any one suggest
recipe for lift-off process.. suggestions will be highly appreciated.
Thanks in advance..

Regards,
A. Ravi Shankar.