[mems-talk] nitride etch

[Michael D Martin]

You might try CF4 + 10-20% H2.  It will not be perfectly selective to
polymers but may be better than some other options. 

-Mike 
 U. of Louisville

-----Original Message-----
From: drp32 at cam.ac.uk 
To: mems-talk at memsnet.org 
Sent: Mon, 15 Jan 2007 7:52 AM
Subject: [mems-talk] nitride etch


hi, 
could anybody share with me her/his nitride etching recepie please?!!!
wish to etch away ~200nm of nitride (SiNx) from a polymer substrate!