[mems-talk] BHF solution

[Gareth Jenkins]

What do you mean by no success - poor quality or something else? The 
type of glass is also relevant. I have had good results with 2% conc. HF 
+ 2% conc. HNO3 when using soda-lime glass. I have never tried it on 
quartz though, but I would not expect it to etch at a similar rate.


Barbara Cortese wrote:
> Hi to all
>
> I'm etching glass and quartz by a wet etching solution of BHF, but my recipe isn't too good. I've tried differrent solutions with no success. Has anyone a good recipe to suggest me?(not just saying BHF 6:1! but the effective quantities!).
>
>