[mems-talk] BHF solution

[Barbara Cortese]

With no success I mean poor etching rate. Do you have a good recipe to suggest a solution that can give me a rapid deep (> than 10 micrometers) etching pit?

> What do you mean by no success - poor quality or something else? The 
> type of glass is also relevant. I have had good results with 2% conc. HF 
> + 2% conc. HNO3 when using soda-lime glass. I have never tried it on 
> quartz though, but I would not expect it to etch at a similar rate.