[mems-talk] Why oxidation rate of polysilicon is much higher than that of single-crystal silicon(100)

wanhong Cheung s01101777 at yahoo.com
Wed Jan 24 11:45:43 EST 2007

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Dear Members,
   
  Can any one tell me why oxidation rate of polysilicon is much higher than that of single-crystal silicon(100)
     
Thanks

Jay

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