[mems-talk] Sensing film for moisture

Yogendra Yadav_04322601 yogendra at ee.iitb.ac.in
Sat Jan 27 01:15:06 EST 2007


Dear All,
I am working on microcantilvere based humdity sensor. i have made the 
device i.e microcantilver of nitride and oxide. for sensing film i want to 
use polyimide but i have not been able to get for long time.
it is because the polyimide now a days has been made to have less water 
absorbing capacity. the earlier series which i want to use is not 
availabale anywhere.

I request plz anyone can help me in finding option for polyimide which i 
can use as sensing film on my cantilever to detect the moisture.

i am in great need of the solution.
plz help.

regards
yogendra


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