[mems-talk] Wet etch for Titanium

[Yue Mun Pun, Jeffrey]

Hi,
I would like to know what I should use to wet etch Titanium thin films, besides the very toxic HF?  I am looking for a combination that is friendly to photoresists such as SU-8 and AZ5214E.

Mr. Jeffrey Mun Pun YUE

Division of Bioengineering
Block E3, #05-18, Nanobioanalytics Lab
9 Engineering Drive 1
National University of Singapore
Singapore 117576
Tel: (65) 65165985, Fax: (65) 68723069
E-mail:  g0500396 at nus.edu.sg
Website:  http://www.bioeng.nus.edu.sg/people/trau/Lab_index.htm