[mems-talk] How to remove PR in the sample with CNT
Lin Yu
yulin7839 at gmail.com
Mon Jan 29 11:12:37 EST 2007
Dear all,
I would like to remove positive photoresist after treating sample in RIE.
And I found that it's very difficult to remove the photoresist in acetone.
Then I want to use PRS 2000. But I don't know whether it will attack
the Carbon nanotube in my sample. Does anyone have the experience
or any suggestion about removing PR in the sample with CNT?
Thanks a lot!
Lin Yu
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