[mems-talk] How to remove PR in the sample with CNT

Lin Yu yulin7839 at gmail.com
Mon Jan 29 11:12:37 EST 2007


Dear all,

I would like to remove positive photoresist after treating sample in RIE. 
And I found that it's very difficult to remove the photoresist in acetone. 
Then I want to use PRS 2000. But I don't know whether it will attack 
the Carbon nanotube in my sample. Does anyone have the experience
or any suggestion about removing PR in the sample with CNT?

Thanks a lot!
Lin Yu


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