[mems-talk] Wet etch for Titanium

[Barbara Cortese]

An etching mixture is HF(50%):H2O2(30%):H20=1:1:20..the etch rate should be 1 micrometer/min at room temperature..Have you tried a hard bake for the AZ5214E?


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Date      : Mon, 29 Jan 2007 11:25:14 +0800
Subject : [mems-talk] Wet etch for Titanium

> Hi,
> I would like to know what I should use to wet etch Titanium thin films, besides the very toxic HF?  I am looking for a combination that is friendly to photoresists such as SU-8 and AZ5214E.