[mems-talk] Platinum deposition problem

[sokwon Paik]

I have hard time in depositing platinum.
   
  I tried three different size e-beam evaporator but all deposition result in my PMMA resist damage.
   
  If resist continues damage, I should go with negative resist for EBL and need to etch out the other area but I'm afraid whether I could get good resolution (~10nm) with etching.
   
  How did you resolve the heat problem? I tried to reduce the evaporation rate but it seems not very helpful.
   
  Thank you,
   
  Sokwon Paik
  Postdoctoral research associate
  Oak Ridge National Laboratory