[mems-talk] Platinum deposition problem

[Jesse D Fowler]

Sokwon,
Assuming you're depositing thick Pt (over 1000 A in this case), the trick 
that worked for me was to deposit some Pt at a slow rate (0.5 A/s), then 
wait a while for it to cool, then deposit some more Pt, etc.

The specific thicknesses and rates you need to use, I don't know. I was 
using AZ 5214, and it had been cooked pretty badly by the first deposition 
I tried (1800 A at 5 A/s). I was much more cautious the second time around 
(500 A at a time, 0.5 A/s). There's probably a higher deposition level 
that's happy.
Jesse Fowler



sokwon Paik <sokwonnp at yahoo.com> writes:

I have hard time in depositing platinum.
 
  I tried three different size e-beam evaporator but all deposition result 
in my PMMA resist damage.
 
  If resist continues damage, I should go with negative resist for EBL and 
need to etch out the other area but I'm afraid whether I could get good 
resolution (~10nm) with etching.
 
  How did you resolve the heat problem? I tried to reduce the evaporation 
rate but it seems not very helpful.
 
  Thank you,
 
  Sokwon Paik