[mems-talk] WG: Silicone spin coating of steel membranes

Bill Moffat BMoffat at yieldengineering.com
Tue Jul 3 14:43:06 EDT 2007


Either a plasma treatment to roughen up the surface or a CVD deposition
of the correct chemistry to match the Silicone surface tension to the
steel membranes.  Contact me directly I can help with both.

Bill Moffat, CEO 
Yield Engineering Systems, Inc. 
203-A Lawrence Drive, Livermore, CA  94551-5152
(925) 373-8353

bmoffat at yieldengineering.com

www.yieldengineering.com

-----Original Message-----
From: mems-talk-bounces at memsnet.org
[mailto:mems-talk-bounces at memsnet.org] On Behalf Of Markus Herz
Sent: Tuesday, July 03, 2007 10:04 AM
To: mems-talk at memsnet.org
Subject: [mems-talk] WG: Silicone spin coating of steel membranes

Hello community,

In a prior project we spin coated steel membranes with silicone, but
adhesion was not satisfying. Metal is not a good adhesion partner for
silicone, roughening or a primer would perhaps help. Any other
recommendations are greatly appreciated!


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