[mems-talk] stress in polisilicon fixed-fixed beams

[bhat soma]

Hi all,

I have one small doubt. I have fixed_fixed beam fabricated using polysilicon. 

Let us assume that the material has inbuilt stress. In a normal beam with width very large in comparison to thickness, we expect beam to bend verticaly up/down. 

Now, if I make width small in comparison to thickness, will the beam bend laterally? 

with regards,

Somashekara Bhat,
Research Scholar,
Electrical Engineering Department,
F3-28, Zig-Zag Road,IIT Madras
Chennai - 36
Phone - 9444779063(mobile)