[mems-talk] Platinum deposition problem

[sokwon Paik]

Jesse,
   
  Thank you for your mentoring.
   
  It was very helpful and made one questions.
   
  What kind of evaporator you use?
   
  I tried even lower deposition rate than you and it seems I need to use the same machine as you for the platinum coating.
   
  Thank you,
   
  Sokwon
  
Jesse D Fowler <Jesse.D.Fowler at aero.org> wrote:
  Sokwon,
Assuming you're depositing thick Pt (over 1000 A in this case), the trick 
that worked for me was to deposit some Pt at a slow rate (0.5 A/s), then 
wait a while for it to cool, then deposit some more Pt, etc.

The specific thicknesses and rates you need to use, I don't know. I was 
using AZ 5214, and it had been cooked pretty badly by the first deposition 
I tried (1800 A at 5 A/s). I was much more cautious the second time around 
(500 A at a time, 0.5 A/s). There's probably a higher deposition level 
that's happy.
Jesse Fowler