[mems-talk] Platinum deposition problem

[Michael D Martin]

Another potential complication that we've run into is resist outgassing.
You might want to vacuum bake your substrate before doing the deposition.

-Mike Martin
 U. of Louisville

>>> sokwon Paik <sokwonnp at yahoo.com> 7/5/2007 10:11 AM >>>
Jesse,
 
  Thank you for your mentoring.

  It was very helpful and made one questions.
 
  What kind of evaporator you use?
 
  I tried even lower deposition rate than you and it seems I need to
  use the same machine as you for the platinum coating.
 
  Thank you,
  
  Sokwon