[mems-talk] polymer fabrication

hammouche khales h_khales at hotmail.com
Thu Jul 5 21:58:33 EDT 2007


Hellos all, I have some questions if there is one ho need to help me!
- i need to have some informations for polymer fabrciation (especially  using PDMS ),  and if there is contaminations problems with CMOS process?
- what the clean room class if we need to fabricate bio-chip (or microfluidic devices)? 
Thanks


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