[mems-talk] stress in polisilicon fixed-fixed beams

[Qiao Dayong]

For beams with ultra small width, the beam will bend laterally as i observed in my
experiment. I have the SEM photo of this phenomenon and if you need, I can send it
to you.
>
>Hi all,
> 
> I have one small doubt. I have fixed_fixed beam fabricated using polysilicon. 
> 
> Let us assume that the material has inbuilt stress. In a normal beam with width
very large in comparison to thickness, we expect beam to bend verticaly up/down. 
> 
> Now, if I make width small in comparison to thickness, will the beam bend
laterally? 
>