[mems-talk] About AL protection in TMAH.

[abhaya joshi]

Dear All
i am working on Si etching using TMAH. I am looking for AL protection. In
order to achieve it, i am adding Silisic acid (1.4wt%) and Ammonium
persilpahte (0.7wt%) in 5 Wt% TMAH.
With this etchants, In actually experiment, AL layer is getting etched.
Can be one suggest me, how to achieve AL protection in TMAH with acceptable
Si etching rate.
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Abhay joshi
Universaity of Pune.