[mems-talk] anodic bonding and passivation layer thickness

[Roger Shile]

That linky no worky.  If you give the title of the paper and the journal
perhaps we can find it.

Roger Shile

-----Original Message-----


Hi Heiko,

Did you try Spin on Glass :

http://ej.iop.org/links/rFX7FtpBR/7PdGtMMu3BGc8eyQav5vpA/jm7307.pdf

Anil Agiral
PhD student
MESA+ Institute for Nanotechnology,
University of Twente, The Netherlands