[mems-talk] micro/macro Porous silicon formation

LSujatha ee03d016 at ee.iitm.ac.in
Tue Jul 10 23:47:29 EDT 2007


Dear friends,

Microporous is formed by electrochemical etching of silicon in HF+ethanol 
(aqueous electrolyte) on p-type (100)wafer with 1-10 ohm-cm resistivity. 

Macroporous is formed by electrochemical etching of silicon in HF+DMF
(Dimethyl formamide) (organic electrolyte) on the same wafer mentioned 
above. 

My questions are:

1. What is the theory behind for the formation of macroporous on p-type 
silicon with HF+DMF? i.e. Why is it macropores?

2. Why the electrolyte HF+ethanol is called aqueous and the electrolyte 
HF+DMF is called organic?


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