[mems-talk] Surface Charge problems in PMMA - Ebeam lithography !!

Indusekhar indusekhar at sitarindia.com
Mon Jul 16 00:05:10 EDT 2007

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Hello Madhav
Please try to ground the substrate.This should discharge charge 
accumulated in PMMA during E-beam writing.

Good luck.

Indusekhar
Dr.H.Indusekhar
SITAR
Bangalore

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