[mems-talk] the relation betweeen aspect ratio and height in Bosch process

[matthew king]

Hi all,

Aspect ratio might be achieved up to 1:20 using Bosch
process. But it seems that the aspect ratio achievable
decreases with height increases. Is there any
relationship between the aspect ratio and height in
theory or according to experience?

Thank you  in advance.

Best Regards, 
Matthew King