[mems-talk] Glass etch

[Kagan Topalli]

Dear Kris,
The paper titled as "Characterization of masking layers for deep wet etching 
of glass in an improved HF/HCl solution" by Iliescu et. al; Surface & 
Coating Technology 198 (2005) 314-318 might be helpful. For our case we use 
Cr/Au/Cr/Au mask with pure HF for glass etching but we do not deeply examine 
the surface roughness which is not the important parameter for our 
application.
Regards,

--
Kagan TOPALLI, Ph. D.
Senior Research Engineer
MEMS-VLSI and EMT Group
Middle East Technical University
Dept. of Electrical & Electronics Eng.
TR-06531 Ankara Turkey
Phone: +90 312 210 44 09 or +90 312 210 23 40
Fax: +90 312 210 23 04
http://www.mems.eee.metu.edu.tr/
http://www.eee.metu.edu.tr/~emt/
--
----- Original Message ----- 
From: "kris" <crikxo at yahoo.com>
To: <mems-talk at memsnet.org>
Sent: Monday, July 16, 2007 3:46 PM
Subject: [mems-talk] Glass etch


> Hello,
>
> I am trying to etch glass using Cr/Au mask. I want to
> know the etchant which provides the smooth surfaces.
>
> Also, Can you let me know the etchants for borofloat
> and pyrex glasses.
>
> Thanks,
> Kris
>
>
>