[mems-talk] Etching of glass

[Yue Mun Pun, Jeffrey]

Hi,
I have had problem trying to cut or scribe glass wafers with a diamond scriber in order to dice a glass wafer with straight lines. Can anyone advise me how I can cut or bore holes in glass slides or glass wafers?  Is using patterned mask followed by HF definitely the only method?  What concentration of HF should be used?

Mr. Jeffrey Mun Pun YUE
余文彬
Division of Bioengineering
E3A-07-02, Nanobioanalytics Lab
7 Engineering Drive 1
National University of Singapore
Singapore 117574
Tel: (65) 65166482, Fax: (65) 68723069
E-mail:  g0500396 at nus.edu.sg