[mems-talk] Etchant(s) for SL structure!

[Nitin Shukla]

Hello Everyone,
I have a superlattice structure with following layers in the order:

Au
Cr
PECVD oxide (135 nm)
Si/SiGe SL (0.5 um)
SiGe/SiGeC buffer (1 um)
Si wafer

I want to remove Au, Cr and PECVD oxide layers. I was wondering if anyone could suggest me on what etchants to use so that they selectively remove Au, Cr and PECVD oxide layers but not the other layers.
Thanks,

  Nitin Shukla
  PhD Candidate
  Nanoscale Energy Transport Laboratory
  Department of Mechanical Engineering
  Virginia Tech
  Blacksburg, VA 24061
  Tel No: 540-231-5579