[mems-talk] hybrid integration

[rakesh babu]

Folks,
   
    I am trying to do hybrid integration of a 2mmx 2mm silicon chip and place it into a DRIE etched cavity of Silicon wafer. But i am having problems
   
  1. Is there any pick and place tool that can accurately place chips within 10um tolerance.
   
  2. I am having a gap of 40um between the Silicon chip and the wafer and need to fill it using some biocompatible polymer. The cavity is 250um deep. 
   
  Your comments are greatly appreciated
   
  Best
  Rakesh