[mems-talk] Gold deposition on uncrosslinked SU-8

[Maria Nordström]

Dear Nidhi, 

Look at the paper by D. Haefliger and A. Boisen where they print an Au mask onto non-crosslinked SU-8: J.Micromech.Microeng. 16 (2006) 951-957. (You can find it on our webpage: http://www.mic.dtu.dk/Research/NSE/Nanoprobes/Publications/Journal%20Papers.aspx )

Direct evaporation of metals (Au or Cr) onto non-crosslinked SU-8 does usually not work that well due to the heating effects. 

Sincerely, 
Maria Nordström 
MIC - Department of Micro and Nanotechnology
Techical University of Denmark 


-----Original Message-----
From: nidhi maheshwari [mailto:nidhim15 at gmail.com] 
Sent: 27. maj 2007 17:07
To: mems-talk at memsnet.org
Subject: [mems-talk] Gold deposition on uncrosslinked SU-8

Hi All,
I am looking for a process by which i can have around 50nm thick gold film on uncrosslinked SU-8. The process should be such that it does not croslinkes the SU-8 present. The substrate on which i am coating SU-8 is glass. Any suggestion to this would be highly appreciated.