[mems-talk] Re: Hillrocks Generated during TMAH Etching

kris crikxo at yahoo.com
Fri Jun 1 15:51:39 EDT 2007


Hello,

Are you adding dissolved silicon or Ammonium peroxy
disulphate (APODS) to your solution??

I was wondering if the TMAH solution is 25% weight in
water?? or Alchohol??

Thanks

Kris


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