[mems-talk] RIE Etch

[Tolga YELBOGA]

Hi;

I am interesting with RIE Etching. I will use CF4+H2 gases. Are there
experienced people with using these gases? I need flow rate  (sccm) and rf
power. Also i would like to know gold etching rate in these gases.


Best Regards.

Tolga YELBOGA 
Project Engineer
Nanotechnology Researh Center 
Bilkent University 
Bilkent, Ankara 06800 TURKEY 
Voice: 90-312-290-1020 
www.nanotr.bilkent.edu.tr