[mems-talk] Re: Hillrocks Generated during TMAH Etching

[李科佳]

Hello,

I did not add dissolved silicon or any other kinds of  solutions in the
TMAH. The TMAH solution made by Moses Lake Industries, Inc. is 25% weight in
water. I just poured the TMAH directly from  oringinal bottle to the
chemical reaction container.

Thanks

Kejia Li


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Hello,

Are you adding dissolved silicon or Ammonium peroxy
disulphate (APODS) to your solution??

I was wondering if the TMAH solution is 25% weight in
water?? or Alchohol??

Thanks

Kris