[mems-talk] Chemical Mechanical Polishing of Germanium

[Long Chen]

Hi, I need to smooth the germanium surface using the chemical mechanical 
polishing, and I need some help in the polishing slurry. I tried with 
the Cabot SS-12 slurry which is designed for oxide polishing, it polishs 
amorphous germanium ok but for crystalline germanium, it almost doesn't 
polish at all. I also tried with the Cabot P1000 slurry which is 
designed for polys-silicon, it doesn't polish either. Does anyone have 
such information for the polishing? Any info will be deeply appreciated.
Thanks a lot,
Long